Figure 2

Photo-thermal etching procedures. (a)-(c), preparation of chip surface. (d)-(g) and (h)-(k), schematic drawings and micrographs illustrating the procedure of photo-thermal etching.
Photo-thermal etching procedures. (a)-(c), preparation of chip surface. (d)-(g) and (h)-(k), schematic drawings and micrographs illustrating the procedure of photo-thermal etching.